Aqueous cutting fluid composition
AssigneeDow Global Technologies LLC
InventorsYi Ping Zhu, Bing Liang, Andong Liu, Wanglin Yu
Life of this patent
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Abstract
A water-based cutting fluid that comprises water and a water-soluble polyalkylene glycol (PAG) having cloud point from 30° C. to 80° C. The cutting fluid is water-based, i.e., it comprises at least 50 percent by weight (wt %) water. The cutting fluids are well suited for use with diamond wiresaws for the cutting of silicon ingots. The fluids exhibit one or more of low hydrogen generation, no wafer cleaning issues, good lubricity, good cooling efficiency, good swarf suspension and dispersion, low foaming, are generally non-sensitive to metal ions, and are nonflammable.
Claims15
A cutting fluid comprising:
- Water-soluble polyalkylene glycol (PAG) with a cloud point from 30° C. to 80° C.,
- a polyether grafted polycarboxylate dispersing agent;
- Water, and at least one of:
- a wetting agent;
- a defoamer;
- a corrosion inhibitor;
- a chelant;
- and
- a biocide,
- wherein the PAG is present in an amount of 0.01 to 20 weight percent based on the weight of the cutting fluid;
- and
- wherein the water is present in an amount of 90 to 98 weight percent based on the weight of the cutting fluid.
A process of cutting a hard, brittle material with a wiresaw used in conjunction with a water-based cutting fluid, the process comprising the step of contacting the material with the wiresaw and cutting fluid under cutting conditions at a working temperature for the cutting fluid, the cutting fluid comprising:
- Water-soluble PAG with a cloud point from 30° C. to 80° C., where the cloud point of the water-soluble PAG is below the working temperature for the cutting fluid,
- a polyether grafted polycarboxylate dispersing agent;
- Water, and at least one of:
- a wetting agent;
- a defoamer;
- a corrosion inhibitor;
- a chelant;
- and
- a biocide,
- wherein the PAG is present in an amount of 0.01 to 20 weight percent based on the weight of the cutting fluid;
- and
- wherein the water is present in an amount of 90 to 98 weight percent based on the weight of the cutting fluid.
Dependencies are inferred from the claim text.