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US 9,802,968 B2Granted
Branched siloxanes and methods for synthesis
AssigneeBoard of Regents, The University of Texas System
InventorsC. Grant Willson, Tsuyoshi Ogawa, Michael B Jacobsson
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Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Claims10
A method of reverse-tone step and flash imprint lithography comprising:
- a) providing a substrate;
- b) imprinting features upon said substrate;
- c) planarizing using a functionalized branched siloxane having the structure:
- to create a layer over the features;
- d) etching said layer with fluorine;
- and
- e) etching with O2.
4 more elements
A method of reverse-tone step and flash imprint lithography comprising:
- a) providing a substrate;
- b) coating said substrate with an underlayer;
- c) applying an imprint resist on said underlayer;
- d) imprinting features on said imprint resist with a template mold;
- e) planarizing using a branched and functionalized siloxane having the structure:
- to create a layer over the features;
- f) etching said layer with fluorine;
- and
- g) etching with O2.
6 more elements
Dependencies are inferred from the claim text.