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US 9,802,852 B2Granted
Manufacturing method for SiO2—TiO2 based glass, manufacturing method for plate-shaped member made of SiO2—TiO2 based glass, manufacturing device, and manufacturing device for SiO2—TiO2 based glass
AssigneeNikon Corporation
InventorsToshio Yoshinari, Tadahiko Saito
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Abstract
A method for manufacturing an SiO2—TiO2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO2—TiO2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.
Claims7
A method for manufacturing an SiO2—TiO2 based glass upon a target by a direct method, comprising:
- a first process of preheating the target;
- and
- a second process of growing an SiO2—TiO2 based glass ingot to a predetermined length upon the target which has been preheated, wherein
- the target is heated in the first process such that, in the second process, a temperature of a growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature,
- the target includes a thermal storage portion that accumulates heat during the first process, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion in the direction opposite to that of the glass ingot,
- the thermal storage portion and the heat insulating portion comprise a plate-shaped first member and a plate-shaped second member, respectively,
- the first member has a larger thermal capacity than the second member,
- the second member has a lower thermal conductivity than the first member, and
- the thermal storage portion has convex portions upon a surface of the first member that is opposite to the glass ingot.
6 more elements
Dependencies are inferred from the claim text.