Apparatus and process for treating liquids containing chlorosilanes
AssigneeWacker Chemie AG
InventorsSebastian Liebischer, Daniel Braeunling, Daniel Gaess, Jeffery Thompson
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Abstract
Chlorosilane-containing process streams are treated by vaporizing the process stream, contacting the vaporized process stream with an alkaline medium in a scrubber, the scrubbing liquid being maintained at a pH of 9-13 by introduction of alkaline medium, and feeding the scrubbing medium to a waste treatment plant containing at least one mixing tank in which the pH is adjusted to the range of 7-9 by addition of mineral acid, separating solids by means of a centrifuge, and isolating separated solids.
Claims12
A process for treating a liquid containing at least one chlorosilane, comprising vaporizing the liquid to form a vaporized liquid, treating the vaporized liquid by contacting the vaporized liquid with an alkaline medium in a scrubbing chamber to provide a scrubbing liquid having a pH of 9-13, and subsequently treating scrubbing liquid from the scrubbing chamber in a wastewater treatment apparatus, wherein the treatment in the wastewater treatment apparatus comprises the addition of an acid into the scrubbing liquid in the wastewater treatment apparatus to establish a pH of 6-9 to precipitate silicates, and separating solids formed in the scrubbing liquid in the wastewater treatment apparatus by means of a centrifuge.
Dependencies are inferred from the claim text.