Driving apparatus, lithography apparatus, and method of manufacturing an article

A lithography apparatus configured to perform patterning of a substrate, the lithography apparatus comprising:

• one of an exposure apparatus, a drawing apparatus, or an imprint apparatus;
• and
• a driving apparatus comprising:
• a movable part;
• a measuring device configured to measure a position of the movable part;
• two actuators configured to respectively generate two thrusts having a substantially common axis of action thereof with respect to the movable part;
• and
• a controller configured to:
• control the position by the two actuators based on the measured position of the movable part;
• and
• obtain information of a thrust constant of one of the two actuators, a thrust constant of the other of the two actuators, or rigidity of a member supporting the movable part with respect to the axis of action, or any combination thereof, based on a relationship between a disturbance force estimated based on thrust commands for the two actuators and the measured position of the movable part in a case where one of the two actuators is caused to generate a thrust and the other of the two actuators is caused to control the position, and a thrust command for the one of the two actuators.

A method of manufacturing an article, the method comprising steps of:

• performing patterning of a substrate using a lithography apparatus;
• and
• processing the substrate with the patterning to manufacture the article,
• wherein the lithography apparatus is configured to perform patterning of the substrate, and includes a driving apparatus, and
• wherein the driving apparatus includes:
• a movable part;
• a measuring device configured to measure a position of the movable part;
• two actuators configured to respectively generate two thrusts having a substantially common axis of action thereof with respect to the movable part;
• and
• a controller configured to:
• control the position by the two actuators based on the measured position of the movable part;
• and
• obtain information of a thrust constant of one of the two actuators, a thrust constant of the other of the two actuators, or rigidity of a member supporting the movable part with respect to the axis of action, or any combination thereof, based on a relationship between a disturbance force estimated based on thrust commands for the two actuators and the measured position of the movable part in a case where one of the two actuators is caused to generate a thrust and the other of the two actuators is caused to control the position, and a thrust command for the one of the two actuators.