Pressure-sensitive adhesive tape
AssigneeLG Chem, Ltd.
InventorsSe Woo Yang, Suk Ky Chang, Min Soo Park
Life of this patent
Estimating the term…
Abstract
Provided are a pressure-sensitive adhesive tape, a polishing pad, a method of manufacturing the same, a polishing device and a method of manufacturing a glass substrate. The illustrative pressure-sensitive adhesive tape may be a pressure-sensitive adhesive tape for a polishing material. The pressure-sensitive adhesive tape may be effectively fixed to a surface plate without bubbles, and have excellent resistance to water and a polishing solution and shear strength applied in a polishing process. In addition, the pressure-sensitive adhesive tape may be easily removed from a carrier or surface plate for a polishing pad without residues after polishing.
Claims13
A polishing pad, comprising:
- a pressure-sensitive adhesive tape comprising a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer;
- and
- a polishing material attached to the first pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape, wherein the polishing material includes a polyurethane-based polishing layer,
- wherein the pressure-sensitive adhesive tape comprises:
- a base layer;
- the first pressure-sensitive adhesive layer located on one surface of the base layer;
- and
- the second pressure-sensitive adhesive layer located on the other surface of the base layer, the second pressure-sensitive adhesive layer including an acid-free pressure-sensitive adhesive resin consisting of a lipophilic monomer represented by a compound of Formula 1 at 10 to 30 parts by weight, a (meth)acrylic acid ester monomer other than the lipophilic monomer represented by the compound of Formula 1 at 50 to 99 parts by weight, and a crosslinkable monomer not having a carboxyl group at 0.1 to 10 parts by weight, in a polymerized state,
- wherein the first pressure-sensitive adhesive layer includes a pressure-sensitive adhesive resin consisting of a (meth)acrylic acid ester monomer other than the lipophilic monomer represented by the compound of Formula 1:
- where R1 to R3 are each independently hydrogen or an alkyl group having 1 to 4 carbon atoms, R4 is an aryl group having 6 to 25 carbon atoms or —C(═O)—O—X, where X is a methyl group, a tert-butyl group, or a cycloalkyl group having 6 to 12 carbon atoms,
- at 50 to 99 parts by weight and a crosslinkable monomer at 0.1 to 10 parts by weight in a polymerized state,
- wherein the acid-free pressure-sensitive adhesive resin is a pressure-sensitive adhesive not having a carboxyl group,
- wherein the acid-free pressure-sensitive adhesive resin has a molecular weight (Mw) of from 800,000 to 2,000,000, and
- wherein according to Equation 1:
- Gel fraction (%)=B/A×100 [Equation 1]
- where A is a weight of the pressure-sensitive adhesive layer, and B is a dry weight of an insoluble content obtained after the pressure-sensitive adhesive layer having the weight A is precipitated in ethyl acetate at room temperature for 48 hours,
- the first pressure-sensitive adhesive layer has a gel fraction according to Equation 1 of 40 to 48%, and
- the second pressure-sensitive adhesive layer has a gel fraction according to Equation 1 of 65 to 76%.
Dependencies are inferred from the claim text.