Laser material processing system

A laser material processing system for processing a workpiece by means of a laser beam, comprising:

• an optical system having at least one optical component for focusing the laser beam to form a focal point on the workpiece or in a defined position relative to the workpiece;
• at least one inertial sensor for detecting a transitional and/or rotational acceleration of the at least one optical component of the optical system and/or the workpiece;
• and
• a processing unit connected to the at least one inertial sensor for determining a relative transitional and/or rotational acceleration between the focal point and the workpiece,
• wherein the processing unit comprises a real-time clock for allocating a real-time timestamp to each sensor data and is adapted to calculate an actual velocity and/or an actual relative position between the focal point and the workpiece on the basis of the detected transitional and/or rotational acceleration by integrating over time by using the allocated timestamps and having a respective initial velocity (v0) and/or a respective initial relative position (x0), and
• wherein the processing unit is adapted to control an actuator system to regulate an actual relative position between the focal point and the workpiece to a set relative position by positioning the at least one optical component and/or the workpiece on the basis of the calculated actual relative position between the focal point and the workpiece.