Laser machining apparatus
AssigneeDisco Corporation
InventorsKeiji Nomaru, Koichi Katayama
Life of this patent
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AssigneeDisco Corporation
InventorsKeiji Nomaru, Koichi Katayama
Estimating the term…
A laser machining apparatus has a laser beam irradiation unit that includes: a pulsed laser oscillator that oscillates a pulsed laser beam at a given repetition frequency; first and second condensers that collect the pulsed laser beam oscillated by the pulsed laser oscillator; and a beam splitting unit arranged between the pulsed laser oscillator and the first and second condensers to split the pulsed laser beam oscillated by the pulsed laser oscillator and direct the resultant beams alternately toward the first and second condensers. The beam splitting unit includes a photoelastic modulator that has a piezo element and a synthetic quartz formed in one piece and modulates the laser beam so that a polarization plane of the laser beam is alternately at 0 and 90 degrees by applying, to the piezo element, a high frequency voltage at a frequency that matches the natural frequency of the synthetic quartz.
A laser machining apparatus comprising:
Dependencies are inferred from the claim text.