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US 9,802,175 B2Granted
Method of producing hollow particles, method of producing antireflection coating, and method of producing optical element
AssigneeCanon Kabushiki Kaisha
InventorYu Kameno
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Abstract
The present invention provides a method of producing hollow particles for reducing light scattering in an antireflection coating. This method includes synthesizing core-shell particles including a core containing an organic compound as a major component and a shell containing an inorganic-based compound as a major component in an aqueous medium, dispersing the core-shell particles in an organic solvent, and preparing hollow particles by heating the core-shell particles dispersed in the organic solvent to remove the core therefrom.
Claims8
A method of producing hollow particles, comprising:
- synthesizing core-shell particles comprising a core containing 51% by mass or more of an organic compound and a shell containing 51% by mass or more of an inorganic-based compound in an aqueous medium;
- after the synthesizing, reacting the core-shell particles with a silane coupling agent or a silylating agent before being heated;
- dispersing the core-shell particles in an organic solvent;
- and
- after the dispersing, preparing hollow particles by heating the core-shell particles dispersed in the organic solvent to remove the core therefrom,
- wherein the core-shell particles are heated in a sealed container in the preparation of the hollow particles, and
- wherein the core-shell particles are heated at a temperature of 350 to 500 degrees (Celsius) and a pressure of 4.0 to 30 MPa so as to produce the hollow particles by removing cores from the core-shell particles.
4 more elements
Dependencies are inferred from the claim text.