Purifier cassette

#This disclosure relates to purification and filtration systems. More particularly, embodiments described herein relate to modular purification and filtration systems. Even more particularly, embodiments described herein relate to modular purification and filtration systems for purifying semiconductor manufacturing fluids.

#Semiconductor manufacturing processes are highly sensitive to contamination because depositing even a tiny particle or other contaminants (metals, not volatile residue) on a semiconductor wafer can lead to defects. Therefore, it is common to employ ultraclean purifiers having membranes that remove submicron particles, residues like metal ions and other contaminants. Although different filtration modules have been developed to filter semiconductor manufacturing liquids, rectangular shaped filters have been avoided because rectangular designs are typically unable to meet the filtering and flow rate requirements in a compact design that can withstand the pressures used in semiconductor manufacturing. Therefore, many existing filter modules are cylindrical, having a housing with a one-piece cylindrical bowl or sleeve in which the filter membrane resides. Typically, these filters contain a circular pleated filter membrane that is encased between an external shell and an internal core. Fluid enters the filter module from the top or bottom, flowing between the sleeve before passing through the shell, passing through the filter membrane to the hollow core and exiting the module.

#Existing cylindrical filter modules suffer several shortcomings. One deficiency is that the circular pleated membrane unduly restricts fluid flow because the membrane must be more tightly packed towards the center in order to achieve the circular configuration. Another deficiency is that the cylindrical housings are molded or extruded as single pieces, making it difficult or impossible to add geometries that run perpendicular to the cylinder's axis. Furthermore, many existing filter modules are difficult to install and replace. Since many liquids used in semiconductor manufacturing are corrosive or toxic, filter module replacement presents a danger to workers.

#The drawings accompanying and forming part of this specification are included to depict certain aspects of embodiments of the invention. A clearer impression of the invention, and of the components and operation of systems provided with the invention, will become more readily apparent by referring to the exemplary, and therefore nonlimiting, embodiments illustrated in the drawings, wherein identical reference numerals designate the same components. Note that the features illustrated in the drawings are not necessarily drawn to scale.

#FIGS. 1A-1B are diagrammatic representations of one embodiment of a cassette.

#FIG. 2 is a diagrammatic representation of a view of one embodiment of a cassette body.

#Purification systems and the various features and advantageous details thereof are explained more fully with reference to the nonlimiting embodiments that are illustrated in the accompanying drawings and detailed in the following description. Descriptions of well-known starting materials, processing techniques, components and equipment are omitted so as not to unnecessarily obscure the invention in detail. It should be understood, however, that the detailed description and the specific examples, while indicating preferred embodiments, are given by way of illustration only and not by way of limitation. Various substitutions, modifications, additions and/or rearrangements within the spirit and/or scope of the underlying concept will become apparent to those skilled in the art from this disclosure.

#As used herein, the terms “comprises,” “comprising,” “includes,” “including,” “has,” “having” or any other variation thereof, are intended to cover a non-exclusive inclusion. For example, a process, article, or apparatus that comprises a list of elements is not necessarily limited only those elements but may include other elements not expressly listed or inherent to such process, article, or apparatus. Further, unless expressly stated to the contrary, “or” refers to an inclusive or and not to an exclusive or. For example, a condition A or B is satisfied by any one of the following: A is true (or present) and B is false (or not present), A is false (or not present) and B is true (or present), and both A and B are true (or present).

#Additionally, any examples or illustrations given herein are not to be regarded in any way as restrictions on, limits to, or express definitions of, any term or terms with which they are utilized. Instead, these examples or illustrations are to be regarded as being described with respect to one particular embodiment and as illustrative only. Those of ordinary skill in the art will appreciate that any term or terms with which these examples or illustrations are utilized will encompass other embodiments which may or may not be given therewith or elsewhere in the specification and all such embodiments are intended to be included within the scope of that term or terms. Language designating such nonlimiting examples and illustrations includes, but is not limited to: “for example,” “for instance,” “e.g.,” “in one embodiment.”