US 9,794,661 B2Granted

Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package

AssigneeKnowles Electronics, LLC

InventorsJoshua Watson, Daniel Todd Grosse, Michael Robert Jacobs, William F. Schimpf, Ivelisse Del Valle Figueroa

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Abstract

A surface-mountable MEMS microphone comprising a MEMS microphone die and an application-specific integrated circuit (ASIC) mounted inside a surface-mountable package housing, and fully enclosed therein. The surface-mountable package is a single, self-contained housing that provides an electrical interface to external circuitry for the enclosed MEMS microphone die and the ASIC, and provides electrical, physical, and environmental protection for the MEMS microphone die and the ASIC. The surface-mountable package allows external acoustic energy to enter the package interior via one or more acoustic ports and impinge on the diaphragm of the MEMS microphone die. The cover of the surface-mountable package comprises an acoustic port with ingress protection to limit dust and particle intrusion. The ingress protection can be a formed member that is part of the cover of the surface-mountable package having various shapes, an internal shield, or a combination of both a formed member and internal shield.

Claims20

Dependent claims

A micro-electro-mechanical system (MEMS) microphone, the microphone comprising:

a substrate comprising:
a base layer that has a top surface and a bottom surface;
a first plurality of metal pads disposed on the top surface of the base;
a second plurality of metal pads disposed on the bottom surface of the base layer;
and
one or more electrical pathways disposed within the base layer, wherein the pathways electrically couple one or more of the first plurality of metal pads on the top surface of the base layer to one or more of the second plurality of metal pads on the bottom surface of the base layer;
a MEMS microphone die mounted to the top surface of the substrate and electrically coupled to at least one of the first plurality of metal pads on the top surface of the substrate, wherein the MEMS microphone die comprises a backplate and a diaphragm;
and
a cover formed from a solid material that comprises a top portion and a sidewall portion that adjoins the top portion at an angle and that surrounds and supports the top portion, wherein:
an acoustic port is disposed in the top portion of the cover and passes through the cover;
the sidewall portion of the cover is attached to the top surface of the substrate to define an acoustic chamber for the MEMS microphone die;
the cover further comprises an ingress protection element attached to the interior surface of the cover and disposed inside the acoustic chamber;
and
the ingress protection element is a three-sided cup-shaped shield, wherein the open end of the shield is disposed away from the MEMS microphone die, wherein the three-sided shield is configured to reduce contaminant intrusion into the acoustic chamber.

11 more elements

A micro-electro-mechanical system (MEMS) microphone, the microphone comprising:

a substrate comprising:
a base layer that has a top surface and a bottom surface;
a first plurality of metal pads disposed on the top surface of the base;
a second plurality of metal pads disposed on the bottom surface of the base layer;
and
one or more electrical pathways disposed within the base layer, wherein the pathways electrically couple one or more of the first plurality of metal pads on the top surface of the base layer to one or more of the second plurality of metal pads on the bottom surface of the base layer;
a MEMS microphone die mounted to the top surface of the substrate and electrically coupled to at least one of the first plurality of metal pads on the top surface of the substrate, wherein the MEMS microphone die comprises a backplate and a diaphragm;
and
a cover formed from a solid material that comprises a top portion and a sidewall portion that adjoins the top portion at an angle and that surrounds and supports the top portion, wherein:
an acoustic port is disposed in the top portion of the cover and passes through the cover;
the sidewall portion of the cover is attached to the top surface of the substrate to define an acoustic chamber for the MEMS microphone die;
the cover further comprises an ingress protection element attached to the interior surface of the cover and disposed inside the acoustic chamber;
and
the ingress protection element is a four-sided cup-shaped shield that comprises a shield aperture, wherein the shield aperture is disposed away from the MEMS microphone die, wherein the full shield is configured to reduce contaminant intrusion into the acoustic chamber.

11 more elements

Dependencies are inferred from the claim text.