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US 9,794,499 B2Granted
Wafer-scale pixelated detector system
AssigneeFermi Research Alliance, LLC
InventorsFarah Fahim, Grzegorz Deptuch, Tom Zimmerman
Life of this patent
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Abstract
A large area, gapless, detection system comprises at least one sensor; an interposer operably connected to the at least one sensor; and at least one application specific integrated circuit operably connected to the sensor via the interposer wherein the detection system provides high dynamic range while maintaining small pixel area and low power dissipation. Thereby the invention provides methods and systems for a wafer-scale gapless and seamless detector systems with small pixels, which have both high dynamic range and low power dissipation.
Claims12
A detection system comprising:
- a monolithic pixilated sensor comprising a uniformly segmented pixilated sensing material wherein at least one sensor pixel is defined by said segmentation of said pixilated sensing material;
- an interposer comprising one or more substrates, two or more conducting layers configured on said substrates said conducting layers being isolated by one or more dielectric layers, a plurality of electrically conducting inter-layer via connections, and a plurality of electrically conducting thru holes in said substrate arranged such that one of said conducting layers is operably and mechanically connected to said monolithic pixilated sensor, wherein said interposer is physically sized to be equal to or greater than a physical size of said uniformly segmented sensor area;
- a plurality of application specific integrated circuits further comprising a plurality of pixels associated with each of said plurality of application specific integrated circuits arranged such that one of said conducting layers is operably connected to said plurality of application specific integrated circuits;
- wherein every of said at least one sensor pixel has a corresponding ASIC pixel comprising an analog front-end configured to process an input signal via a bipolar current splitter, said bipolar current splitter comprising a passive integrator and at least one current splitter configured to simultaneously integrate a split current over a plurality of ranges wherein each of said plurality of ranges is of a different scale;
- wherein said interposer provides pitch adaptation between said monolithic pixilated sensor and said plurality of pixels associated with each of said plurality of application specific integrated circuits;
- and
- wherein said monolithic pixilated sensor, said interposer, and said plurality of application specific integrated circuits are fabricated independently and merged to form said detection system.
4 more elements
A method for gapless data detection comprising:
- configuring a monolithic pixilated sensor with a uniformly segmented sensor area to collect incident electromagnetic radiation wherein said monolithic pixilated sensor comprises a pixilated sensing material;
- defining at least one sensor pixel by segmentation of said pixilated sensing material configured to produce charge signals in response to incident electromagnetic radiation;
- configuring an interposer to be physically sized to be equal to or greater than a physical size of said uniformly segmented sensor area wherein said interposer comprises one or more substrates, two or more conducting layers configured on said substrates said conducting layers being isolated by one or more dielectric layers, a plurality of electrically conducting inter-layer via connections, and a plurality of electrically conducting thru holes in said substrate arranged such that one of said conducting layers is operably and mechanically connected to said monolithic pixilated sensor;
- connecting a plurality of application specific integrated circuits, to one of said conducting layers, said plurality of application specific integrated circuits further comprising a plurality of pixels associated with each of said plurality of application specific integrated circuits, said ASIC pixels further comprising an analog front-end configured to process an input signal via a bipolar current splitter;
- associating every of said at least one sensor pixel with a corresponding ASIC pixel wherein said ASIC pixel is smaller than said sensor pixel;
- simultaneously integrating a split current over a plurality of ranges with said bipolar current splitter, comprising a passive integrator and at least one current splitter, wherein each of said plurality of ranges is of a different scale;
- providing pitch adaptation between said monolithic pixilated sensor and said plurality of pixels associated with each of said plurality of application specific integrated circuits with said interposer;
- and
- merging said monolithic pixilated sensor, said interposer, and said plurality of application specific integrated circuits during fabrication to form said detection system.
6 more elements
A large area, gapless, detection apparatus comprising:
- a monolithic pixilated sensor comprising a uniformly segmented pixilated sensing material wherein at least one sensor pixel is defined by said segmentation of said pixilated sensing material;
- an interposer comprising one or more substrates, two or more conducting layers configured on said substrates said conducting layers being isolated by one or more dielectric layers, a plurality of electrically conducting inter-layer via connections, and a plurality of electrically conducting thru holes in said substrate arranged such that one of said conducting layers is operably and mechanically connected to said monolithic pixilated sensor, wherein said interposer is physically sized to be equal to or greater than a physical size of said uniformly segmented sensor area;
- a plurality of application specific integrated circuits further comprising a plurality of pixels associated with each of said plurality of application specific integrated circuits arranged such that one of said conducting layers is operably connected to said plurality of application specific integrated circuits;
- wherein every of said at least one sensor pixel has a corresponding ASIC pixel comprising an analog front-end configured to process an input signal via a bipolar current splitter, said bipolar current splitter comprising a passive integrator and at least one current splitter configured to simultaneously integrate a split current over a plurality of ranges wherein each of said plurality of ranges is of a different scale;
- wherein said interposer provides pitch adaptation between said monolithic pixilated sensor and said plurality of pixels associated with each of said plurality of application specific integrated circuits;
- and
- wherein said monolithic pixilated sensor, said interposer, and said plurality of application specific integrated circuits are fabricated independently and merged to form said detection apparatus.
4 more elements
Dependencies are inferred from the claim text.