Resonator element, method for manufacturing resonator element, resonator, gyro sensor, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorAtsushi Matsuo
Life of this patent
Estimating the term…
Abstract
To improve durability against impact, a quartz crystal resonator element includes a recess in a plan view. The quartz crystal resonator element further includes a first principal surface and a second principal surface that are front and rear surfaces facing away from each other and a side surface disposed between the first principal surface and the second principal surface, and the side surface is formed of flat surfaces and curved surfaces formed by dry etching and alternately arranged. The quartz crystal resonator element preferably has a base and at least one resonating arm extending from the base.
Claims15
A quartz crystal resonator element comprising;
- a first principal surface;
- a second principal surface that is opposite to the first principal surface;
- and
- a side surface that connects the first principal surface and the second principal surface, wherein the side surface is formed of flat surfaces and curve-shaped surfaces formed by dry etching, and the flat surfaces and the curve-shaped surfaces are alternately arranged around an entire perimeter of the resonator element so that the side surface does not include any sharp corners formed by the joining of two consecutive flat surfaces along the perimeter.
Dependencies are inferred from the claim text.