Apparatus for separating substrate and method of separating substrate by using the same
AssigneeSamsung Display Co., Ltd.
InventorsWonwoo Choi, Seungho Yoon, Cheryong Hwang, Sangbong Lee
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Abstract
An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.
Claims20
An apparatus for separating a substrate, the apparatus comprising:
- a stage;
- and
- an adsorber facing the stage and comprising a plurality of vacuum pad portions,
- wherein an upper surface of the stage comprises:
- a first region having a flat surface;
- and
- a pair of second regions located on opposing sides of and adjacent to the first region, wherein each of the second regions has a flat surface, and wherein the flat surface of each second region is inclined downwardly with respect to the flat surface of the first region.
A method of separating a substrate, the method comprising:
- loading on a stage a carrier substrate having one side on which a flexible substrate is formed;
- forming a crack in opposing ends of the flexible substrate;
- wherein the crack is formed to propagate through the flexible substrate in the depth dimension of the flexible substrate;
- and
- separating the carrier substrate from the cracked flexible substrate.
An apparatus for separating a substrate, the apparatus comprising:
- a stage;
- and
- an adsorber facing the stage,
- wherein an upper surface of the stage comprises:
- a first region;
- and
- at least one second region adjacent to the first region,
- wherein the adsorber comprises a first vacuum pad portion facing the first region and at least one second vacuum pad portion adjacent to the first vacuum pad portion, and facing the second region, and wherein the at least one second vacuum pad portion is tiltable with respect to the first vacuum pad portion,
- wherein the at least one second region is inclined downwardly from the first region such that the at least one second region has an obtuse angle with respect to the first region, wherein the width of the first region is smaller than that of the substrate, and wherein the at least one second region is apart from the end portion of the substrate.
Dependencies are inferred from the claim text.