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US 9,793,481 B2Granted
Patterning by stamped metal resist
AssigneeThe Regents of the University of Michigan
InventorsStephen R. Forrest, Momchil T. Mihnev, Andre D. Taylor, Xin Xu
Life of this patent
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Abstract
A method is provided. A first layer is provided over a substrate, the first layer comprising a first material. A patterned second layer is applied over the first layer via stamping. The second layer comprising a second material. The second layer covers a first portion of the first layer, and does not cover a second portion of the first layer. The second portion of the first layer is removed via a subtractive process while the first portion of the first layer is protected from removal by the patterned second layer.
Claims26
A method, comprising:
- providing a first layer over a substrate, the first layer comprising a first material;
- applying a second material to an elastic stamp and placing the elastic stamp applied with the second material over an opening of a vacuum mold having a permeable or semipermeable surface, the surface having generally the same shape as the substrate;
- deforming the elastic stamp applied with the second material to a non-planar shape into an interior of the vacuum mold by applying a vacuum wherein the non-planar shape of the elastic stamp applied with the second material is the shape of the permeable or semipermeable surface;
- positioning the deformed elastic stamp applied with the second material in close proximity to the first layer without contacting the first layer;
- forming a patterned second layer by releasing the vacuum from the vacuum mold, such that the second material contacts the first material via the deformed elastic stamp returning to a relaxed state;
- such that the patterned second layer covers a first portion of the first layer, and does not cover a second portion of the first layer;
- and
- removing the second portion of the first layer via a subtractive process while the first portion of the first layer is protected from removal by the patterned second layer,
- wherein the second material is a metal.
6 more elements
A method, comprising:
- providing a first layer over a substrate, the first layer comprising a first material;
- depositing a strike layer on the first layer;
- applying a second material to an elastic stamp and placing the elastic stamp applied with the second material over an opening of a vacuum mold having a permeable or semipermeable surface, the surface having generally the same shape as the substrate;
- deforming the elastic stamp applied with the second material to a non-planar shape into an interior of the vacuum mold by applying a vacuum wherein the non-planar shape of the elastic stamp applied with the second material is the shape of the permeable or semipermeable surface;
- positioning the deformed elastic stamp applied with the second material in close proximity to the strike layer without contacting the strike layer;
- forming a patterned second layer by releasing the vacuum from the vacuum mold, such that the second material contacts the strike layer via the deformed elastic stamp returning to a relaxed state;
- such that the patterned second layer covers a first portion of the strike layer, and does not cover a second portion of the strike layer;
- and
- removing the second portion of the strike layer via a subtractive process while the first portion of the strike layer is protected from removal by the patterned second layer,
- wherein the second material is a metal.
7 more elements
A method, comprising:
- providing a first layer over a substrate, the first layer comprising a first material including a transparent conductive oxide;
- depositing a strike layer comprising a metal on the first layer;
- applying a second material to an elastic stamp and placing the elastic stamp applied with the second material over an opening of a vacuum mold having a permeable or semipermeable surface, the surface having generally the same shape as the substrate;
- deforming the elastic stamp applied with the second material to a non-planar shape into an interior of the vacuum mold by applying a vacuum wherein the non-planar shape of the elastic stamp applied with the second material is the shape of the permeable or semipermeable surface;
- positioning the deformed elastic stamp applied with the second material in close proximity to the strike layer without contacting the strike layer;
- forming a patterned second layer by releasing the vacuum from the vacuum mold, such that the second material contacts the strike layer via the deformed elastic stamp returning to a relaxed state;
- such that the patterned second layer covers a first portion of the strike layer and the first layer, and does not cover a second portion of the strike layer and the first layer;
- removing the second portion of the strike layer;
- removing the second portion of the first layer via a subtractive process while the first portion of the first layer is protected from removal by the patterned second layer;
- and
- removing the patterned second layer after the second portion of the first layer is removed, such that the first portion of the first layer remains,
- wherein the second material comprises the metal.
9 more elements
A method, comprising:
- providing a first layer over a non-developable convex surface of a substrate, the first layer comprising a first material;
- applying a second material to an elastic stamp and placing the elastic stamp applied with the second material over an opening of a vacuum mold having a permeable or semipermeable surface, the surface having generally the same shape as the substrate;
- deforming the elastic stamp applied with the second material to a non-planar shape into an interior of the vacuum mold by applying a vacuum wherein the non-planar shape of the elastic stamp applied with the second material is the shape of the permeable or semi-permeable surface;
- positioning the deformed elastic stamp applied with the second material in close proximity to the first layer without contacting the first layer;
- forming a patterned second layer by releasing the vacuum from the vacuum mold, such that the second material contacts the first material via the deformed elastic stamp returning to a relaxed state;
- such that the patterned second layer covers a first portion of the first layer, and does not cover a second portion of the first layer, and
- removing the second portion of the first layer via a subtractive process while the first portion of the first layer is protected from removal by the patterned second layer,
- wherein the second material s a metal, and the first material includes a transparent conductive oxide.
5 more elements
Dependencies are inferred from the claim text.