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US 9,793,467 B2Granted
Method for reducing size and center positioning of magnetic memory element contacts
AssigneeIntel Corporation
InventorsBrian S. Doyle, Yong Ju Lee, Charles C. Kuo, David L. Kencke, Kaan Oguz, Roksana Golizadeh Mojard, Uday Shah
Life of this patent
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Abstract
A method of centering a contact on a layer of a magnetic memory device. In one embodiment, a spacers is formed in an opening surrounding the upper layer and the contact is formed within the spacer. The spacer is formed from an anisotropically etched conformal layer deposited on an upper surface and into the opening.
Claims7
A method for fabricating a contact on an upper surface of a memory device comprising:
- (a) forming a magnetic tunnel junction (MTJ) device over a substrate;
- forming a masking member on an upper surface of the MTJ device;
- depositing a dielectric layer surrounding the masking member and the MTJ device;
- planarizing the dielectric layer to expose the masking member;
- (b) removing the masking member thereby defining an opening in the dielectric layer exposing the upper surface the MTJ device;
- (c) depositing a conformal layer covering the upper surface of the MTJ device and sides of the opening;
- (d) anisotropically etching the conformal layer thereby forming a spacer lining each opening;
- (e) depositing a contact material into the opening and over the dielectric layer;
- and (f) polishing the contact material to remove the contact material from over the dielectric layer and to form a via from the contact material in the opening.
6 more elements
A contact on an upper layer of a magnetic tunneling junction (MTJ) device comprising:
- a metal contact disposed on the upper layer of an MTJ device, having a generally annular shape of uniform width, the contact being aligned with the edges of the upper layer.
Dependencies are inferred from the claim text.