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US 9,793,466 B2Granted
Ultrasonic sensor and manufacturing method thereof
AssigneeMiiCs & Partners Inc.
InventorJuan Wang
Life of this patent
Estimating the term…
Abstract
An ultrasonic sensor includes a substrate. A first electrode and a first piezoelectric layer are stacked on one side of the substrate. A second electrode and a second piezoelectric layer are stacked on the other side of the substrate. A notch is defined in the first piezoelectric layer. And a conductive film is coated within the notch to couple the first electrode and the first piezoelectric layer.
Claims19
An ultrasonic sensor, comprising:
- a substrate;
- a first electrode arranged on one side of the substrate;
- a first piezoelectric layer arranged on the first electrode opposite to the substrate;
- a second electrode arranged on the other side of the substrate;
- a second piezoelectric layer arranged on the second electrode opposite to the substrate;
- a notch defined in the first piezoelectric layer;
- and
- a conductive film coated within the notch to couple the first electrode and the first piezoelectric layer.
5 more elements
A manufacturing method of an ultrasonic sensor, comprising:
- combining a first electrode and a second electrode to two opposite sides of a substrate;
- coating a first piezoelectric layer on the first electrode and a second piezoelectric layer on the second electrode;
- defining a notch on the first piezoelectric layer;
- and
- coating a conductive film within the notch to couple the first electrode and the first piezoelectric layer.
2 more elements
An ultrasonic sensor, comprising:
- a substrate;
- a first electrode and a first piezoelectric layer stacked on one side of the substrate;
- a second electrode and a second piezoelectric layer stacked on the other side of the substrate;
- a notch defined in the first piezoelectric layer;
- and
- a conductive film coated within the notch to couple the first electrode and the first piezoelectric layer.
3 more elements
Dependencies are inferred from the claim text.