Technique for the growth and fabrication of semipolar (Ga,Al,In,B)N thin films, heterostructures, and devices
AssigneesThe Regents of the University of California, Japan Science and Technology Agency
InventorsRobert M. Farrell, Jr., Troy J. Baker, Arpan Chakraborty, Benjamin A. Haskell, P. Morgan Pattison, Rajat Sharma, Umesh K. Mishra, Steven P. DenBaars, James S. Speck, Shuji Nakamura
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