US 9,793,229 B1Granted

Insulating protrusion in the trench of a re-distribution layer structure

AssigneeChipMOS Technologies Inc.

InventorEn-Sung Hu

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Abstract

A re-distribution layer structure is adapted to be disposed on a substrate having a pad and a protective layer which has a first opening exposing a part of the pad. The re-distribution layer structure includes a first and a second patterned insulating layers and a re-distribution layer. The first patterned insulating layer is disposed on the protective layer and includes at least one protrusion and a second opening corresponding to the first opening. The re-distribution layer is disposed on the first patterned insulating layer and includes a pad portion and a wire portion. The pad portion is located on the first patterned insulating layer. The wire portion includes a body and at least one trench caved in the body. The body extends from the pad portion to the pad exposed by the first and the second openings. The body covers the protrusion, and the at least one protrusion extends into the at least one trench. The second patterned insulating layer covers the wire portion and exposes a part of the pad portion. A manufacturing method of re-distribution layer structure is further provided.

Claims10

Dependent claims

A re-distribution layer structure, disposed on a substrate, the substrate having a pad and a protective layer, wherein the protective layer has a first opening, the first opening exposes a part of the pad, and the re-distribution layer structure comprises:

a first patterned insulating layer, disposed on the protective layer and comprising a second opening and at least one protrusion, wherein the second opening is corresponded to the first opening so as to expose a part of the pad, and the at least one protrusion protrudes toward a direction away from the protective layer;
a re-distribution layer, disposed on the first patterned insulating layer and comprising a pad portion and a wire portion, wherein the pad portion is located on the first patterned insulating layer, the wire portion comprises a body and at least one trench caved in the body, the wire portion is located on the first patterned insulating layer and extends from the pad portion into the first opening and the second opening so as to connect with the pad, the at least one protrusion extends into the at least one trench, and the body covers the at least one protrusion;
and
a second patterned insulating layer, disposed on the first patterned insulating layer, the second patterned insulating layer covering the wire portion and exposing a part of the pad portion.

1 more element

Dependencies are inferred from the claim text.