Isolation device

An isolation device that isolates a first electrical signal of a first circuit from reaching a second circuit, comprising:

• a substrate having a first surface;
• a first plate electrically coupled to the first circuit;
• a second plate electrically coupled to the second circuit, wherein the first plate and the second plate are positioned in parallel to each other;
• an isolation material sandwiched between the first plate and the second plate, the isolation material allowing a coupling signal to travel between the first plate and the second plate enabling communication between the first circuit and the second circuit even though the first circuit and second circuit are electrically isolated from one another;
• and
• at least one trench extending at least partially through the isolation material in a direction substantially perpendicular to the first surface, wherein the at least one trench is positioned adjacent to the first plate and the second plate,
• wherein the at least one trench comprises a plurality of trench members surrounding at least one of the first plate and the second plate,
• wherein each of the plurality of trench members comprises a curvature segment, and
• wherein the curvature segment of each of the plurality of trench members extend axially from a curvature center that is located on at least one of the first plate and the second plate.

An isolation device that isolates a first electrical signal of a first circuit from reaching a second circuit, comprising:

• a substrate having a first surface;
• a first plate electrically coupled to the first circuit;
• a second plate electrically coupled to the second circuit, wherein the first plate and the second plate are positioned in parallel to each other;
• an isolation material sandwiched between the first plate and the second plate, the isolation material allowing a coupling signal to travel between the first plate and the second plate enabling communication between the first circuit and the second circuit even though the first circuit and second circuit are electrically isolated from one another;
• at least one trench extending at least partially through the isolation material in a direction substantially perpendicular to the first surface, wherein the at least one trench is positioned adjacent to the first plate and the second plate;
• and
• an etch stop layer connected to a bottom portion of the at least one trench.

An isolation device that isolates a first electrical signal of a first circuit from reaching a second circuit, comprising:

• a substrate having a first surface;
• a first plate electrically coupled to the first circuit;
• a second plate electrically coupled to the second circuit, wherein the first plate and the second plate are positioned in parallel to each other;
• an isolation material sandwiched between the first plate and the second plate, the isolation material allowing a coupling signal to travel between the first plate and the second plate enabling communication between the first circuit and the second circuit even though the first circuit and second circuit are electrically isolated from one another;
• at least one trench extending at least partially through the isolation material in a direction substantially perpendicular to the first surface, wherein the at least one trench is positioned adjacent to the first plate and the second plate;
• and
• a passivation layer substantially covering the isolation material, wherein the at least one trench is filled using a dielectric material.