Hybrid electronic device protected against humidity and method of protecting a hybrid electronic device against humidity
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, Thales
InventorsFrancois Marion, Tony Maindron
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Abstract
This method concerns the protection against humidity of a device including a first and a second electronic components respectively having two opposite surfaces, the surfaces: being separated by a non-zero distance shorter than 10 micrometers; having an area greater than 100 mm2; being connected by an assembly of electrical interconnection elements spaced apart from one another by a space void of matter. This method includes applying a deposit of thin atomic layers onto the device to form a layer of mineral material covering at least the interconnection elements, the layer of mineral material having a permeability to water vapor smaller than or equal to 10−3 g/m2/day.
Claims9
A method of protecting against humidity by providing a device comprising a first and a second electronic components respectively having two opposite surfaces, said surfaces:
- being separated by a non-zero distance shorter than 10 micrometers;
- having an area greater than 100 mm2;
- being connected by an assembly of electrical interconnection elements spaced apart from one another by a space void of matter,
- the method further comprising applying a deposit of thin atomic layers onto the device to form a layer of mineral material covering at least said interconnection elements, the layer of mineral material having a permeability to water vapor smaller than or equal to 10−3 g/m2/day.
A device comprising a first and a second electronic components respectively having two opposite surfaces, said surfaces:
- being separated by a non-zero distance shorter than 10 micrometers;
- having an area greater than 100 mm2;
- being connected by a set of different electrical interconnection elements, said device comprising a layer of mineral material at least covering said interconnection elements, the layer of mineral material having a permeability to water vapor smaller than or equal to 10−3 g/m2/day.
Dependencies are inferred from the claim text.