Plasma etching method

A plasma etching method of etching a processing target object, which includes a silicon nitride layer and a first mask formed on the silicon nitride layer, placed in a plasma processing apparatus, the plasma etching method comprising:

• a first process of supplying a processing gas containing oxygen and fluorocarbon into the plasma processing apparatus;
• and
• a second process of etching the silicon nitride layer of the processing target object with the first mask by exciting the processing gas into plasma to form a substantially vertically extended hole from an upper end portion of the hole to a bottom end portion of the hole,
• wherein the second process is performed in a state where an organic film generated from the processing gas is formed on an inner wall of an opening of the first mask by reducing a temperature of the processing target object from a first temperature of about 80° C. to a second temperature of about 40° C.,
• the temperature of the processing target object is reduced into multiple stages until the temperature reaches the second temperature from the first temperature to form the substantially vertically extended hole, and
• wherein a tapered hole is formed at the first temperature, and the tapered hole is changed into the substantially vertically extended hole by reducing the temperature from the first temperature to the second temperature.