Combined laser processing system and focused ion beam system

A processing system for forming a cross-section of an object, the processing system comprising:

• a focused ion beam system for forming the cross-section from a prepared surface region of the object;
• a laser and a light optical system for forming the prepared surface region by laser ablation of a processing region of the object wherein the forming of the prepared surface region comprises scanning each of a first and a second laser beam along a common scanning line in the processing region;
• wherein the first laser beam is directable onto common impingement locations of the common scanning line for performing the scanning of the first laser beam along the common scanning line and the second laser beam is directable onto the common impingement locations for performing the scanning of the second laser beam along the common scanning line;
• wherein an arrangement of the processing region during the scanning of the first laser beam is substantially identical to an arrangement of the processing region during the scanning of the second laser beam;
• wherein for each of the impingement locations, an angle between a first incidence direction along an axis of the first laser beam and a second incidence direction along an axis of the second laser beam is greater than 10 degrees, measured in a stationary coordinate system.

A processing system for forming a cross-section of an object, the processing system comprising:

• a focused ion beam system for forming the cross-section from a prepared surface region of the object;
• a laser and a light optical system for forming the prepared surface region by laser ablation of a processing region of the object wherein the forming of the prepared surface region comprises canning each of a first laser beam and a second laser beam along a common scanning line in the processing region;
• wherein the light optical system is configured to direct the first laser beam onto common impingement locations of the common scanning line for performing the scanning of the first laser beam along the common scanning line and to direct the second laser beam onto the common impingement locations for performing the scanning of the second laser beam along the common scanning line;
• wherein for each of the impingement locations, an angle between a first incidence direction along an axis of the first laser beam and a second incidence direction along an axis of the second laser beam is greater than 10 degrees, measured in a stationary coordinate system.

A method of operating a processing system for forming a cross-section from a prepared surface region of an object, wherein the processing system comprises:

• a focused ion beam system for forming the cross-section from the prepared surface region;
• a laser and a light optical system for forming the pre-prepared surface region by laser ablation of a processing region of the object;
• wherein the forming of the prepared surface region comprises scanning each of a first and a second laser beam along a scanning line in the processing region;
• wherein the method comprises:
• performing the scanning of the first laser beam by directing the first laser beam onto impingement locations of the scanning line in the processing region of the object, wherein the processing region is arranged in a first arrangement;
• performing a translational movement by a positioning system such that the translational movement translates the first arrangement of the processing region into a second arrangement of the processing region;
• and
• performing the scanning of the second laser beam by directing the second laser beam onto the impingement locations of the scanning line;
• wherein for each of the impingement locations, an angle between a first incidence direction along an axis of the first laser beam and a second incidence direction along an axis of the second laser beam is greater than 10 degrees, measured in a stationary coordinate system.

A method of operating a processing system for forming a cross-section from a prepared surface region of an object, wherein the processing system comprises:

• a focused ion beam system for forming the cross-section from the prepared surface region;
• a laser and a light optical system for forming the prepared surface region by laser ablation in a processing region of the object;
• wherein the forming of the prepared surface region comprises scanning each of a first and a second laser beam along a scanning line;
• wherein the method comprises:
• performing the scanning of the first laser beam by directing the first laser beam onto impingement locations of a scanning line in the processing region of the object;
• and
• performing the scanning of the second laser beam by directing the second laser beam onto the impingement locations of the scanning line;
• wherein an arrangement of the processing region during the scanning of the first laser beam is substantially identical to an arrangement of the processing region during the scanning of the second laser beam;
• wherein for each of the impingement locations, an angle between a first incidence direction along an axis of the first laser beam and a second incidence direction along an axis of the second laser beam is greater than 10 degrees, measured in a stationary coordinate system.

A method of operating a processing system for forming a cross-section from a prepared surface region of an object;

• wherein the processing system comprises:
• a focused ion beam system for forming the cross-section from a prepared surface region of the object;
• a laser and a light optical system for forming the prepared surface region by laser ablation of a processing region of the object;
• wherein the forming of the prepared surface region comprises scanning each of a first laser beam and a second laser beam along a scanning line in the processing region;
• wherein the method comprises:
• performing the scanning of the first laser beam by directing the first laser beam onto impingement locations of a scanning line;
• and
• performing the scanning of the second laser beam by directing the second laser beam onto the impingement locations of the scanning line;
• wherein for each of the impingement locations, an angle between a first incidence direction along an axis of the first laser beam and a second incidence direction along an axis of the second laser beam is greater than 10 degrees, measured in a stationary coordinate system.