Reliability improvement of polymer-based capacitors by moisture barrier

A microelectronic device, comprising:

• a substrate of inorganic material;
• a capacitor, comprising:
• a first plate disposed above the substrate;
• a second plate disposed above the substrate;
• and
• a capacitor dielectric comprising an organic polymer material and an inorganic dielectric material disposed between the first plate and the second plate;
• and
• a moisture barrier disposed over the capacitor, the moisture barrier comprising a layer of aluminum oxide having an amorphous microstructure, wherein the moisture barrier extends over a horizontal surface of the second plate, over a horizontal surface of the organic polymer material that extends beyond the second plate, and over a horizontal surface of the inorganic dielectric material that extends beyond the organic polymer material.