Low pressure arc plasma immersion coating vapor deposition and ion treatment

A vacuum coating and plasma treatment system comprising:

• a plasma assembly facing a substrate, the plasma assembly including:
• a magnetron cathode including a magnetron target with a long edge and a short edge;
• a remote anode electrically connected to the magnetron cathode;
• a remote arc discharge generated separate from the magnetron cathode and adjacent to the magnetron target;
• a remote arc discharge cathode hood extending over the remote arc discharge and across the short edge of the magnetron cathode;
• and
• a primary cathode positioned in the remote arc discharge cathode hood;
• a remote arc discharge anode hood, the remote arc discharge anode hood and the remote arc discharge cathode hood being positioned on opposing sides of the magnetron cathode wherein the remote anode is positioned in the remote arc discharge anode hood;
• a magnetic system creating magnetic field lines which extends into and confines a plasma in front of the plasma assembly and a substrate, the magnetic system including magnets that form a magnetic barrier and a sputtering racetrack such that the remote arc discharge is confined by the magnetic barrier and extends along a direction parallel to the long edge of the magnetron target, the remote arc discharge extending from the remote arc discharge cathode hood to the remote arc discharge anode hood;
• a magnetron cathode power supply connected to the magnetron cathode and to the remote anode;
• a remote arc discharge power supply connected between the primary cathode and the remote anode;
• and
• a wire electrode shaped in a convex direction toward the substrate.