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US 9,793,094 B2Granted
Extraction electrode
AssigneeIon Technology Solutions, LLC
InventorsManuel A. Jerez, Carlos F. M. Borges
Life of this patent
Estimating the term…
Abstract
The extraction electrode has a pair of sub-assemblies that define a gap. Each sub-assembly has a suppression plate and ground plate secured together in spaced relation by pairs of insulating assemblies. A plate assembly extends perpendicularly from the ground plate. The gap between the subassemblies is set by tabs on a centering fixture extension.
Claims8
An extraction electrode for an ion implanter comprising
- a pair of sub-assemblies defining a gap therebetween;
- each said sub-assembly including
- a suppression plate of semi-circular shape having a rectangular notch in a side thereof facing a suppression plate of the other of said pair of sub-assemblies,
- a cover disposed over said notch of said suppression plate and spaced from a cover of the other of said pair of subassemblies to define a slit therewith,
- a ground plate spaced from said suppression plate and having a notch in a side thereof in alignment with said notch of said suppression plate,
- a pair of insulating assemblies connected to said suppression plate and passing through said ground plate, said insulating assemblies spacing said suppression plate from said ground plate,
- a shield secured to said ground plate and disposed within said notch of said suppression plate and within said notch of said ground plate to define a path for an ion beam thereby, and
- a plate assembly extending perpendicularly from said ground plate.
5 more elements
In combination
- an extraction electrode including a pair of sub-assemblies defining a gap therebetween;
- each said sub-assembly including a suppression plate of semi-circular shape having a notch facing a suppression plate of the other of said pair of sub-assemblies, a ground plate spaced from said suppression plate and having a notch in a side thereof in alignment with said notch of said suppression plate, a pair of insulating assemblies disposed between said suppression plate and said ground plate to space said suppression plate from said ground plate, and a plate assembly extending perpendicularly from said ground plate;
- a centering fixture extension having a plurality of clamps for clamping said extraction electrode to said extension;
- and
- an original equipment fixture secured to said extension.
2 more elements
Dependencies are inferred from the claim text.