Electron emitter device with integrated multi-pole electrode structure
AssigneeKLA-Tencor Corporation
InventorsThomas Plettner, Mehran Nasser-Ghodsi
Life of this patent
Estimating the term…
Abstract
A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Claims24
A field emission device, comprising:
- one or more emitter elements formed on a substrate, each element having a high aspect ratio structure with a nanometer scale cross section;
- and
- one or more segmented electrodes formed on the substrate, each electrode surrounding a corresponding one of the one or more emitter elements, wherein each of the one or more segmented electrodes includes multiple electrode plates in a number twice that is a number of multipole moments to be corrected, wherein independent voltages are applied to each of the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control.
A method, comprising:
- forming one or more emitter elements on a substrate, wherein each of the one or more emitter elements has a high aspect ratio structure with a nanometer scale cross section;
- and
- forming one or more segmented electrodes on the substrate, each surrounding one of the one or more emitter elements, wherein each of the one or more segmented electrodes has multiple electrode plate in a number twice a number of multipole moments to be corrected, wherein independent voltages are applied to the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control.
A system comprising:
- a field emission device comprising:
- one or more emitter elements formed on a substrate, each element having a high aspect ratio structure with a nanometer scale cross section;
- and
- one or more segmented electrodes formed on the substrate, each electrode surrounding a corresponding one of the one or more emitter elements, wherein each of the one or more segmented electrodes includes multiple electrode plates in a number twice a number of multipole moments to be corrected, wherein independent voltages are applied to the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control;
- and
- an electron optical column configured to form electrons emerging from the one or more emitter elements into one or more electron beams and image the one or more electron beams onto a target.
Dependencies are inferred from the claim text.