Microstructured surface with low work function
AssigneeElwha LLC
InventorsRoderick A. Hyde, Jordin T. Kare, Tony S. Pan, Lowell L. Wood, Jr.
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Abstract
A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each multilayer structure is configured to produce a 2-dimensional electron gas at a junction between two layers within the structure. The emitter also includes an exposed surface intersecting the 2-dimensional electron gas of each of the plurality of vertically-stacked multilayer structures to form a plurality of effectively one-dimensional horizontal line sources of electron emission.
Claims25
A method of fabricating a HMJFE structure, comprising:
- disposing a first multilayer structure on a first substrate including a first surface, the first multilayer structure being configured to produce a first 2DEG at a junction between two layers within the first multilayer structure;
- disposing a first isolation layer on the first multilayer structure;
- disposing a second multilayer structure on the first isolation layer, the second multilayer structure configured to produce a second 2DEG at a junction between two layers within the second multilayer structure;
- and
- disposing a first anode on the first surface of the first substrate, the first anode configured to collect electrons emitted by the first 2DEG.
A method of fabricating a VEJFE structure, comprising:
- forming a plurality of vertical structures on a substrate, wherein forming each vertical structure includes positioning at least two vertically oriented layers adjacent to one another to create a junction between the two vertically oriented layers;
- and
- truncating the plurality of vertical structures on an opposite side of the plurality of vertical structures from the substrate to expose an edge of the junction, the junction configured to produce a 2-dimensional electron gas (2DEG).
Dependencies are inferred from the claim text.