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US 9,793,055 B2Granted
Electronic device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsAkira Fujimoto, Naofumi Nakamura, Tamio Ikehashi
Life of this patent
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Abstract
According to one embodiment, an electronic device includes an underlying region, a variable capacitor including fixed electrodes and movable electrodes alternately arranged in a direction not perpendicular to a main surface of the underlying region, and a protective film which covers the variable capacitor and includes a conductive portion electrically connected to the fixed electrodes and having a hole.
Claims15
An electronic device comprising:
- an underlying region;
- a variable capacitor including fixed electrodes and movable electrodes alternately arranged in a direction not perpendicular to a main surface of the underlying region;
- and
- a protective film which covers the variable capacitor and includes a conductive portion electrically connected to the fixed electrodes and having a hole.
1 more element
Dependencies are inferred from the claim text.