Charged particle beam apparatus, specimen observation system and operation program

A charged particle beam apparatus comprising:

• an image display device;
• a storage unit which stores image state information on a state of a specimen image acquired via a detector of the charged particle beam apparatus such that the image state information is correspondent to image quality of the specimen image as well as to observation conditions comprised of a combination of parameter setting values of the charged particle beam apparatus;
• a processor which is programmed to make operation items of the charged particle beam apparatus be displayed on an operation screen on the image display device, analyze the image quality of the specimen image acquired via the detector, acquire the image state information of the specimen image from the storage unit based on analytical results of the image quality of the specimen image as well as current observation conditions, and make the acquired image state information be displayed on a predetermined part of the operation screen on the image display device;
• and
• a deflector control circuit, an upper deflector, a lower deflector, and an input device,
• wherein the image quality of the specimen image includes values of luminescence distribution and sharpness acquired from the specimen image, and
• wherein the processor is further programmed to:
• restrict a function of the charged particle beam apparatus under the observation conditions by executing the steps of:
• activating an image shift by causing the deflector control circuit to control the upper deflector and the lower deflector to deflect a primary electron beam and deactivating stage movement based on information inputted through the input device when a magnification is equal to or greater than a predetermined value, or
• activating stage movement based on information inputted through the input device and deactivating an image shift by causing the deflector control circuit to control the upper deflector and the lower deflector not to deflect the primary electron beam when a magnification is smaller than the predetermined value.