Flow control device equipped with flow monitor
AssigneeFujikin Incorporated
InventorsMasaaki Nagase, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda
Life of this patent
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Abstract
A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.
Claims7
A flow control device equipped with flow monitor, comprising:
- a build-down type flow monitor unit provided on an upstream side;
- a flow control unit provided on a downstream side of the build-down type flow monitor unit;
- a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit;
- and
- a set flow rate value adjustment mechanism for adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit,
- wherein the flow control unit comprises a control valve, an orifice or a critical nozzle provided on the downstream side of the control valve, a pressure sensor for detecting a pressure between the control valve and the orifice or the critical nozzle, and a flow rate calculation control unit configured to calculate a flow rate of gas flowing through the orifice or the critical nozzle based on a measurement output from the pressure sensor and control the control valve, and
- the flow control unit comprises an additional pressure sensor provided on a downstream side of the orifice or the critical nozzle.
A flow control device equipped with flow monitor, comprising:
- a build-down type flow monitor unit provided on an upstream side;
- a flow control unit provided on a downstream side of the build-down type flow monitor unit;
- a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit;
- and
- a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit, wherein
- the build-down type flow monitor unit includes a build-down chamber and
- the chamber is configured so that an inner cylinder and an outer cylinder are concentrically arranged and fixed, a space between the inner cylinder and the outer cylinder which form the chamber is used as a gas flow passage, and a pressure sensor is provided in the chamber.
Dependencies are inferred from the claim text.