Correction value computation device, correction value computation method, and computer program

A method for computing a correction value for a control parameter in a manufacturing process executed on a manufacturing apparatus, comprising:

• acquiring an apparatus model representing a relationship between an index value of a fluctuation phenomenon in a manufacturing apparatus and a fluctuation amount in a process element of an environment in which a manufacturing process is executed;
• acquiring a process model representing a relationship between a performance indicator rating results of executing the manufacturing process and the process element;
• acquiring an output value output from a sensor provided in the manufacturing apparatus;
• transforming the output value acquired from the sensor into a first fluctuation amount for the process element;
• acquiring the index value of the fluctuation phenomenon in the manufacturing apparatus;
• transforming the index value into a second fluctuation amount for the process element based on the apparatus model;
• computing a fluctuation amount for the performance indicator from the first and second fluctuation amounts for the process element based on the process model;
• computing a correction amount for the performance indicator from a control range for the performance indicator and the fluctuation amount computed for the performance indicator;
• and
• converting the correction amount computed for the performance indicator into a correction amount for each process element based on the process model such that a correction value for a control parameter in the manufacturing process executed on the manufacturing apparatus is computed from the correction amount converted for each process element.

A non-transitory computer readable medium stored thereon a program that when executed by a computer causes the computer having circuitry to execute a method for computing a correction value for a control parameter in a manufacturing process executed on a manufacturing apparatus, the method comprising:

• acquiring an apparatus model representing a relationship between an index value of a fluctuation phenomenon in a manufacturing apparatus and a fluctuation amount in a process element of an environment in which a manufacturing process is executed;
• acquiring a process model representing a relationship between a performance indicator rating results of executing the manufacturing process and the process element;
• acquiring an output value output from a sensor provided in the manufacturing apparatus;
• transforming the output value acquired from the sensor into a first fluctuation amount for the process element;
• acquiring the index value of the fluctuation phenomenon in the manufacturing apparatus;
• transforming the index value into a second fluctuation amount for the process element based on the apparatus model;
• computing a fluctuation amount for the performance indicator from the first and second fluctuation amounts for the process element based on the process model;
• computing a correction amount for the performance indicator from a control range for the performance indicator and the fluctuation amount computed for the performance indicator;
• and
• converting the correction amount computed for the performance indicator into a correction amount for each process element based on the process model such that a correction value for a control parameter in the manufacturing process executed on the manufacturing apparatus is computed from the correction amount converted for each process element.