Method for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit
AssigneeCarl Zeiss SMT GmbH
InventorMichael Patra
Life of this patent
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Abstract
Methods are disclosed for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit for the definition of an illumination channel for a partial beam of illumination light.
Claims21
A method of assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit to define an illumination channel for a partial beam of illumination light, which proceeding from a light source that generates the illumination light, reflects from the field facet and the assigned pupil facet then toward an object field, the method comprising:
- identifying an illumination parameter useable to evaluate an illumination of the object field;
- determining a dependence of the illumination parameter on at least one parameter selected from the group consisting of design predefinition data of optical parameters of the light source, design predefinition data of optical parameters of the illumination optical unit, individual part acceptance data of optical parameters of the light source, individual part acceptance data of optical parameters of the illumination optical unit, total system acceptance data of optical parameters of the light source at a location at which the light source is produced, total system acceptance data of optical parameters of the illumination optical unit at a location where the illumination optical unit is produced, calibration data of optical parameters of the light source at a location where the projection exposure apparatus is installed, calibration data of optical parameters of the illumination optical unit at a location where the projection exposure apparatus is installed, online measurement data of optical parameters of the light source, and online measurement data of optical parameters of the illumination optical unit;
- predefining an illumination channel-dependent evaluation function for evaluating a potential illumination channel group based on the illumination parameter;
- predefining an evaluation target range of evaluation variables based on the evaluation function;
- and
- selecting the illumination channels whose evaluation variable is within the evaluation target range, thereby assigning the pupil facet of the pupil facet mirror to the field facet of the field facet mirror so that, during use of the optical unit, the illumination channels are superimposed in the object field,
- wherein the method further comprises providing a data set which assigns data to each field point of the object field, wherein the data comprises:
- a distribution of the illumination angles which illuminate the field point and illumination intensities at the respective illumination angles.
A method of assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit to define an illumination channel for a partial beam of illumination light, which proceeding from a light source that generates the illumination light, reflects from the field facet and the assigned pupil facet then toward an object field, the method comprising:
- identifying an illumination parameter useable to evaluate an illumination of the object field;
- determining a dependence of the illumination parameter on at least one parameter selected from the group consisting of design predefinition data of optical parameters of the light source, design predefinition data of optical parameters of the illumination optical unit, individual part acceptance data of optical parameters of the light source, individual part acceptance data of optical parameters of the illumination optical unit, total system acceptance data of optical parameters of the light source at a location at which the light source is produced, total system acceptance data of optical parameters of the illumination optical unit at a location where the illumination optical unit is produced, calibration data of optical parameters of the light source at a location where the projection exposure apparatus is installed, calibration data of optical parameters of the illumination optical unit at a location where the projection exposure apparatus is installed, online measurement data of optical parameters of the light source, and online measurement data of optical parameters of the illumination optical unit;
- predefining an illumination channel-dependent evaluation function for evaluating a potential illumination channel group based on the illumination parameter;
- predefining an evaluation target range of evaluation variables based on the evaluation function;
- and
- selecting the illumination channels whose evaluation variable is within the evaluation target range, thereby assigning the pupil facet of the pupil facet mirror to the field facet of the field facet mirror,
- wherein:
- the method further comprises providing a data set which assigns data to each field point of the object field;
- and
- the data comprises:
- a distribution of the illumination angles which illuminate the field point;
- and illumination intensities at the respective illumination angles.
A method of assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit to define an illumination channel for a partial beam of illumination light, which proceeding from a light source that generates the illumination light, reflects from the field facet and the assigned pupil facet then toward an object field, the method comprising:
- identifying an illumination parameter useable to evaluate an illumination of the object field;
- determining a dependence of the illumination parameter on at least one parameter selected from the group consisting of design predefinition data of optical parameters of the light source, design predefinition data of optical parameters of the illumination optical unit, individual part acceptance data of optical parameters of the light source, individual part acceptance data of optical parameters of the illumination optical unit, total system acceptance data of optical parameters of the light source at a location at which the light source is produced, total system acceptance data of optical parameters of the illumination optical unit at a location where the illumination optical unit is produced, calibration data of optical parameters of the light source at a location where the projection exposure apparatus is installed, calibration data of optical parameters of the illumination optical unit at a location where the projection exposure apparatus is installed, online measurement data of optical parameters of the light source, and online measurement data of optical parameters of the illumination optical unit;
- predefining an illumination channel-dependent evaluation function for evaluating a potential illumination channel group based on the illumination parameter;
- predefining an evaluation target range of evaluation variables based on the evaluation function;
- and
- selecting the illumination channels whose evaluation variable is within the evaluation target range, thereby assigning the pupil facet of the pupil facet mirror to the field facet of the field facet mirror so that, during use of the optical unit, the illumination channels are superimposed in the object field,
- wherein the method further comprises, to prepare for selecting the illumination channels, predefining radii of curvature for the pupil facets of the pupil facet mirror.
Dependencies are inferred from the claim text.