US 9,791,692 B2Granted

Electrooptical device, method for manufacturing electrooptical device, and electronic apparatus

AssigneeSeiko Epson Corporation

InventorYoshikazu Eguchi

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Abstract

An electrooptical device includes a substrate, a mirror that is made up of a plurality of films which are arranged so as to be separated from the substrate on one plane of the substrate, and a supporting portion that is arranged between the substrate and the mirror, and has a portion which is connected to a portion of the mirror so as to support the mirror, in which the mirror includes a third mirror film which is a reflective metal film that is arranged on a side of the mirror which is opposite to the substrate, a second mirror film which is a high melting point metal film that is arranged between the reflective metal film and the substrate, and a first mirror film which is an antioxidative film that is arranged between the high melting point metal film and the substrate.

Claims9

Dependent claims

An electrooptical device comprising:

a substrate;
a mirror that is arranged so as to be separated from the substrate on one plane of the substrate;
and
a supporting portion that is arranged between the substrate and the mirror, and has a portion which is connected to a portion of the mirror so as to support the mirror,
wherein the mirror includes
a reflective metal film that is arranged on a side of the mirror which is opposite to the substrate,
a high melting point metal film that is arranged between the reflective metal film and the substrate, and
an antioxidative film that is arranged between the high melting point metal film and the substrate, and
wherein
the reflective metal film and the antioxidative film include a same material, and
the high melting point metal film is thinner than the reflective metal film and the antioxidative film.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/807,400Filed 23 Jul 2015
Priority: JP 2014-15155825 Jul 2014
Published: US 2016/0025965 A128 Jan 2016
Granted: 17 Oct 2017
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

G02B 26/0841
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting element being moved or deformed by electrostatic means
G02B 1/14
Optical coatings produced by application to, or surface treatment of, optical elements: protective coatings, e.g. hard coatings
G02B 5/0833
The reflecting layers comprising dielectric materials only: comprising inorganic materials only
G02B
Optical elements, systems or apparatus