Mirror array
AssigneeCarl Zeiss SMT GmbH
InventorsSeverin Waldis, Sebastian Lani, Benedikt Knauf, Jian Deng, Roger Marc Bostock
Life of this patent
Estimating the term…
Abstract
A mirror array having a total surface extending perpendicularly to a surface normal, comprises a multiplicity of mirror elements each having a reflection surface and at least one degree of freedom of displacement, wherein the totality of the mirror elements form a parqueting of a total reflection surface of the mirror array, and wherein the mirror array is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays.
Claims23
A mirror array having a surface normal and a total surface which extends perpendicular to the surface normal, the mirror array comprising:
- a multiplicity of mirror elements, each mirror element comprising a reflection surface, each mirror element having at least one degree of freedom of displacement,
- wherein:
- a totality of the multiplicity of mirror elements define a parqueting of a total reflection surface of the mirror array;
- the mirror array is embodied modularly as a tile element so that the parqueting of the total reflection surface is extendable via tiling of a plurality of such mirror arrays;
- and
- a ratio of the total reflection surface to the total surface is at least 0.75.
An optical component, comprising:
- a mirror array having a surface normal and a total surface which extends perpendicular to the surface normal, the mirror array comprising a multiplicity of mirror elements;
- and
- a carrying structure which is offset with respect to the mirror array in a direction of the surface normal,
- wherein:
- each mirror element comprises a reflection surface;
- each mirror element has at least one degree of freedom of displacement;
- a totality of the multiplicity of mirror elements define a parqueting of a total reflection surface of the mirror array;
- the mirror array is embodied modularly as a tile element so that the parqueting of the total reflection surface is extendable via tiling of a plurality of such mirror arrays;
- and
- the carrying structure projects beyond the total surface of the mirror array by at most 1 mm in a direction perpendicular to the surface normal.
Dependencies are inferred from the claim text.