Lightweight carrier structure, particularly for optical components, and method for its production
AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorsOliver Baldus, Volker Schmidt
Life of this patent
Estimating the term…
Abstract
A carrier structure (100), particularly for optical components, includes a carrier body (10) which is formed from ceramic with hollows (11), and at least one cover layer (21, 22) which is formed from glass, arranged on at least one surface of the carrier body (10), and is connected to the carrier body (10) by means of at least one bond connection (23, 24) produced by means of anodic bonding. Methods for producing the carrier structure (100) and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.
Claims16
A carrier structure comprising:
- a carrier body having a thickness direction and a lateral direction and consisting of SiSiC ceramic with hollows, wherein the hollows extend in the thickness direction through the carrier body in such a manner that at least one continuous closed side wall consisting of said SiSiC ceramic and extending in the lateral direction remains, which forms at least one main surface of the carrier body and which continuously closes one side of the carrier body in the thickness direction, and
- at least one cover layer comprising glass and arranged on the at least one main surface of the carrier body,
- wherein the at least one cover layer is connected to the at least one main surface of the carrier body by at least one anodic bond connection being produced by anodic bonding and the at least one anodic bond connection comprises an ion concentration gradient across an interface between the at least one cover layer and the at least one main surface of the carrier body connected to one another.
A carrier structure comprising:
- a carrier body having a thickness direction and a lateral direction and consisting of SiSiC ceramic with hollows, wherein the hollows extend in the thickness direction through the carrier body in such a manner that at least one continuous closed side wall consisting of said SiSiC ceramic and extending in the lateral direction remains, which forms at least one main surface of the carrier body and which continuously closes one side of the carrier body in the thickness direction;
- at least one cover layer comprising glass and arranged on the at least one main surface of the carrier body;
- and
- at least one reflector layer arranged on at least one surface of the at least one cover layer,
- wherein:
- (a) the at least one cover layer is connected to the at least one main surface of the carrier body by at least one anodic bond such that there is an ion concentration gradient across an interface between the at least one cover layer and the at least one main surface of the carrier body;
- (b) the at least one cover layer has a thickness from 10 μm to 50 μm;
- (c) the hollows are defined by intermediate walls between hollows and non-intermediate walls arranged at sides of the carrier body;
- and (d) the non-intermediate walls are thicker than the intermediate walls.
Dependencies are inferred from the claim text.