Scintillator panel and method for manufacturing scintillator panel
AssigneeToray Industries, Inc.
InventorsTsubasa Hamano, Takahiro Tanino, Yuichiro Iguchi
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Abstract
The present invention provides a scintillator panel which is provided with a narrow barrier rib with high accuracy in a large area, has a high light emission luminance, and provides sharp images. The present invention provides a scintillator panel including: a plate-like substrate; a grid-like barrier rib provided on the substrate; and a scintillator layer containing a phosphor filled in cells divided by the barrier rib, wherein the barrier rib is mainly composed of a low-melting-point glass, and the substrate is formed of a material which is mainly composed of a ceramic selected from the group consisting of alumina, aluminum nitride, mullite and steatite.
Claims4
A scintillator panel comprising:
- a plate-like substrate;
- a grid-like barrier rib provided on the substrate;
- and a scintillator layer containing a phosphor filled in cells divided by the barrier rib, wherein
- the barrier rib is formed of a material which is mainly composed of a low-melting-point glass, and
- the substrate is a polycrystalline substance produced by firing a raw material containing a fine powder of a ceramic selected from the group consisting of alumina, aluminum nitride, mullite and steatite,
- wherein the substrate has a reflectivity of light having a wavelength of 550 nm of 40% or more.
A method for manufacturing a scintillator panel comprising:
- forming a photosensitive paste coating film by applying onto a substrate a photosensitive paste containing a low-melting-point glass powder and a photosensitive organic component;
- exposing the obtained photosensitive paste coating film to light through a photomask having a predetermined opening;
- dissolving and removing a part of the exposed photosensitive paste coating film which is soluble in a developer to obtain a photosensitive paste coating film pattern;
- heating the photosensitive paste coating film pattern after development to 500 to 700° C. to remove the organic component and soften and sinter the low-melting-point glass and thereby forming a barrier rib;
- and
- filling a phosphor in cells divided by the barrier rib,
- wherein the scintillator panel comprises a plate-like substrate, a grid-like barrier rib provided on the substrate, and a scintillator layer containing a phosphor filled in cells divided by the barrier rib, and
- wherein the plate-like substrate is a polycrystalline substance produced by firing a raw material containing a fine powder of a ceramic selected from the group consisting of alumina, aluminum nitride, mullite, and steatite,
- wherein the substrate has a reflectivity of light having a wavelength of 550 nm of 40% or more.
Dependencies are inferred from the claim text.