Display panel integrated with sensor and manufacturing method thereof, and display device
AssigneesBoe Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd.
InventorsYun Qiu, Jiuxia Yang, Zhidong Wang
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Abstract
Embodiments of the invention provide a display panel and a manufacturing method thereof, and a display device comprising such a display panel. At least one sensor is integrated into the display panel through a semiconductor process that is at least partially synchronously performed with processes of forming the array substrate and/or color filter substrate of the display panel, such that an integration level of the sensor on the display panel is increased and the process is simplified.
Claims20
A display panel, comprising:
- a first substrate;
- a second substrate disposed facing the first substrate;
- and
- at least one sensor integrated between the first substrate and the second substrate,
- wherein the sensor comprises an acceleration sensor comprising:
- a first electrode formed on the first substrate;
- a second electrode formed on the second substrate;
- an enclosing wall disposed between the first substrate and the second substrate, an enclosed cavity being defined by the enclosing wall, the first electrode and the second electrode;
- a mass block disposed in the enclosed cavity to divide the enclosed cavity into a first cavity and a second cavity that are isolated from each other, the mass block being able to move between the first substrate and the second substrate along the enclosing wall to change volumes of the first cavity and the second cavity;
- and
- a first fluid and a second fluid filled in the first cavity and the second cavity respectively, so as to allow the mass block to move freely within the enclosed cavity.
A display panel, comprising:
- a first substrate;
- a second substrate disposed facing the first substrate;
- and
- at least one sensor integrated between the first substrate and the second substrate,
- wherein the sensor comprises a pressure sensor comprising a first electrode formed on the first substrate, a second electrode facing the first electrode and a partition wall disposed between the first electrode and the second electrode;
- and
- wherein at least one enclosed microcavity is defined by the first electrode, the second electrode, and the partition wall, and at least one of the first electrode and the second electrode is formed of graphene.
A display panel, comprising:
- a first substrate;
- a second substrate disposed facing the first substrate;
- and
- at least one sensor integrated between the first substrate and the second substrate,
- wherein the sensor comprises an acoustic sensor comprising a first electrode formed on the first substrate, a second electrode facing the first electrode, a back cavity located between the first electrode and the second electrode, a microhole penetrating through the first substrate and communicating the back cavity with external environment, and an acoustic sensitive structure arranged on the second electrode, the acoustic sensitive structure being at least partially made from silicon.
Dependencies are inferred from the claim text.