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US 9,791,410 B2Granted
Discharge ionization current detector
AssigneeShimadzu Corporation
InventorsKei Shinada, Shigeyoshi Horiike, Takahiro Nishimoto
Life of this patent
Estimating the term…
Abstract
A low-OH-content quartz glass with an OH content equal to or lower than 5 ppm is used as a cylindrical tube (2) covering the surface of metallic plasma generation electrodes (4, 5 and 6) for generating a low-frequency barrier discharge. It has been found that, in the low-frequency barrier discharge, hydrogen and oxygen originating from the OH contained in a dielectric material are released into plasma gas for a long period of time, constituting a primary cause of an increase in the baseline current. The use of a low-OH-content quartz glass dramatically lowers the baseline current and thereby improves the S/N ratio and the detection limit.
Claims6
A discharge ionization current detector, comprising:
- a discharge electrode having a surface covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein quartz glass with a hydroxyl-group content equal to or lower than 5 ppm is used as the dielectric member.
1 more element
A discharge ionization current detector, comprising:
- a discharge electrode having a surface covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein a material prepared by performing a heat treatment on quartz glass with an upper limit of a hydroxyl-group content higher than 5 ppm at a temperature of 500° C. or higher in a predetermined kind of inert-gas atmosphere is used as the dielectric member.
1 more element
A discharge ionization current detector, comprising:
- a discharge electrode having a surface covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein sapphire is used as the dielectric member, thereby reducing a concentration of impurities mainly composed of hydrogen and oxygen released from the discharge electrode into the plasma gas.
1 more element
A discharge ionization current detector, comprising:
- a discharge electrode having a surface covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein high-purity alumina is used as the dielectric member, thereby reducing a concentration of impurities mainly composed of hydrogen and oxygen released from the discharge electrode into the plasma gas.
1 more element
A discharge ionization current detector, comprising:
- a discharge electrode having a surface covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein the dielectric member has a thin-film layer made of a dielectric material with a hydroxyl-group content equal to or lower than 5 ppm and forming a 2-μm depth range from the surface coming in contact with plasma.
1 more element
A discharge ionization current detector, comprising:
- a discharge electrode on a cylindrical tube covered with a dielectric member and provided so as to be exposed to an inside of a gas passage through which plasma gas is passed;
- an alternating voltage supplier for applying a low-frequency alternating voltage to the discharge electrode so as to generate a dielectric barrier discharge in the gas passage and thereby produce plasma from the plasma gas;
- and a current detector for detecting an ion current due to a sample component in a sample gas ionized by an action of the plasma in the gas passage,
- wherein a coating layer with a thickness of 2 μm or greater is formed on the surface of the cylindrical tube by deposition techniques using silica glass, silicon nitride, alumina, or diamond-like carbon as the low-OH-content dielectric material.
1 more element
Dependencies are inferred from the claim text.