X-ray fluorescence analyzer and measurement position adjusting method therefore
AssigneeHitachi High-Tech Science Corporation
InventorIsao Yagi
Life of this patent
Estimating the term…
Abstract
An X-ray fluorescence analyzer is provided with: a sample stage on which a sample subjected to an analysis is mounted; an X-ray source configured to irradiate the sample with primary X-rays; a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays; an imaging unit configured to capture an image of a predetermined field-of-view area on the sample stage; a display unit configured to display the field-of-view area of the image captured by the imaging unit; and a pointer irradiation unit configured to irradiate the sample stage with a visible light at an irradiation position within an area that is outside the field-of-view area and near the field-of-view area.
Claims10
An X-ray fluorescence analyzer comprising:
- a sample stage on which a sample subjected to an analysis is mounted;
- an X-ray source configured to irradiate the sample with primary X-rays;
- a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays;
- an imaging unit configured to capture an image of a predetermined field-of-view area on the sample stage;
- a display unit configured to display the predetermined field-of-view area of the image captured by the imaging unit;
- and
- a pointer irradiation unit configured to irradiate the sample stage with a visible light at an irradiation position within an area that is outside the predetermined field-of-view area and near the predetermined field-of-view area.
A measurement position adjusting method for an X-ray fluorescent analyzer of capturing an image of a sample mounted on a sample stage using an imaging unit, displaying the image captured by the imaging unit on a display unit, positioning X-rays with which the sample is irradiated, and performing measurement or analysis of the sample, the method comprising:
- coarsely positioning the sample while irradiating the sample stage with a visible light at an irradiation position within an area that is outside a field-of-view area and near the field-of-view area;
- displaying the image captured by the imaging unit on the display unit;
- and
- finely positioning the sample based on the image displayed on the display unit after coarsely positioning the sample.
A measurement position adjusting method for an X-ray fluorescence analyzer having a sample stage, an imaging unit and a display unit, the method comprising:
- coarsely positioning a sample mounted on the sample stage while irradiating the sample stage with a visible light at an irradiation position within an area that is outside a field-of-view area and near the field-of-view area, the field-of-view area being an area on the sample stage in which an image is captured by the imaging unit;
- capturing the image of the field-of-view area by the imaging unit;
- displaying the image captured by the imaging unit on the display unit;
- and
- finely positioning the sample based on the image displayed on the display unit after coarsely positioning the sample.
Dependencies are inferred from the claim text.