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US 9,791,380 B2Granted
Inspection device and image capture element
AssigneeHitacthi High-Technologies Corporation
InventorTakahiro Jingu
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Abstract
An imaging device includes multiple sensor pixels that are arranged in a predetermined direction, each sensor pixel having multiple sensor pixel borders defining an outer edge part of the sensor pixel, among which at least one of a pair of sensor pixel borders that are opposed in the arrangement direction is oblique to a passage direction of a defect image that is vertical to the predetermined direction. This can provide an inspection tool enabling high sensitivity inspection and/or having improved detection reproducibility of a defect.
Claims20
An inspection tool, comprising:
- illumination optics configured to supply inspection light to a sample to define an illumination area on the sample;
- an imaging device configured to detect light from the sample;
- and
- a processor, wherein:
- the imaging device includes multiple sensor pixels that are arranged in a direction substantially vertical to a main scanning direction of the illumination area on the sample,
- a pair of sensor pixel borders opposed in the pixel arrangement direction are oblique to the main scanning direction, and
- the processor is configured to:
- determine whether a detection signal waveform from the multiple sensor pixels includes a peak, and
- acquire a position of a defect on the sample based on a detection signal waveform determined to include a peak.
6 more elements
Dependencies are inferred from the claim text.