Infrared thermal sensor with beams having different widths

An infrared thermal sensor for detecting infrared radiation, the infrared thermal sensor comprising:

• a substrate and a cap structure together forming a sealed cavity;
• a membrane arranged in said cavity for receiving infrared radiation through a window or aperture;
• a plurality of beams for suspending the membrane, each beam of the plurality of beams comprising at least one thermocouple arranged therein or thereon for measuring a temperature difference between the membrane and the substrate due to the infrared radiation;
• wherein:
• the plurality of beams comprises at least two beams having a different length;
• and wherein each of the thermocouples in or on the plurality of beams have a substantially same constant width to length ratio;
• and wherein each of the beams form a straight connection between a first anchor point on a side of the cavity and a second anchor point on the membrane;
• and wherein the beams are oriented in a non-radial direction with respect to a center of the membrane.