Method for calibrating yaw rate sensors

A method for calibrating a production yaw rate sensor selected from a plurality of yaw rate sensors, the plurality of yaw rate sensors including a substrate having a main plane of extent, a seismic mass movable in relation to the substrate, a drive device for deflecting the seismic mass in a drive direction, a detection device for detecting a force action of the seismic mass in a detection direction perpendicular to the drive direction, and a test device for deflecting the seismic mass parallel to the detection direction, the method comprising:

• measuring a production drive frequency on the drive device of the production yaw rate sensor;
• measuring a production detection frequency on the detection device of the production yaw rate sensor;
• applying a yaw rate about an axis of rotation to a first sampling yaw rate sensor designated from the plurality of yaw rate sensors for measuring a first sample yaw rate sensitivity, and measuring an output voltage on the detection device of the first sampling yaw rate sensor as a function of the yaw rate;
• applying a test signal to the test device of the production yaw rate sensor for measuring a test signal sensitivity of the production yaw rate sensor, and measuring a detection voltage on the detection device of the production yaw rate sensor as a function of the test signal applied to the test device of the production yaw rate sensor, wherein the test signal is applied to the test device of the production yaw rate sensor to generate the force action on the seismic mass in a detection direction;
• calculating a production yaw rate sensitivity for the production yaw rate sensor from the measured production test signal sensitivity of the production yaw rate sensor and a scaling function, wherein the scaling function is determined from the measured first sample yaw rate sensitivity and from a measured first sample test signal sensitivity of the first sampling yaw rate sensor;
• and
• calibrating the production yaw rate sensor with the production yaw rate sensitivity;
• wherein a quadrature signal is used as the test signal for measuring the production test signal sensitivity, and
• wherein the test device generates the force action on the seismic mass modulated in the detection direction using a drive movement of the seismic mass.