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US 9,791,274 B2Granted
MEMS mass-spring-damper systems using an out-of-plane suspension scheme
AssigneeKing Abdullah University of Science and Technology
InventorsAhmed Kamal Said Abdel Aziz, Abdel Hameed Sharaf, Mohamed Yousef Serry, Sherif Salah Sedky
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Abstract
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
Claims15
A MEMS accelerometer, comprising:
- a proof mass;
- plural anchors distributed in a plane;
- and
- a plurality of suspensions, the suspensions connecting between the proof mass and the plural anchors;
- wherein a longest length of said plurality of suspensions extends out from said plane defined by said plural anchors, and
- wherein said proof mass is located at least partially directly on top of said plural anchors.
3 more elements
Dependencies are inferred from the claim text.