Measuring device for reflection measurements of test objects and method for measuring radiation reflected by test objects
AssigneeINOEX GmbH
InventorThomas Hochrein
Life of this patent
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Abstract
A measuring device for reflection measurements of test objects includes a transmitter for emitting radiation, a first collimation element for aligning the emitted radiation, a first focusing element for focusing emitted radiation in relation to the test object, and a receiver for detecting radiation reflected by the test object. There is a second collimation element for aligning the reflected radiation, and a second focusing element for focusing the reflected radiation in relation to the receiver. At least two of the first and second collimation elements and first and second focusing elements are separate from each other. Thus, a simple and flexible design of the measuring device is achieved, which can be adapted to the test object.
Claims20
A measuring device for reflection measurements of test objects, comprising:
- a) a transmitter for emitting terahertz radiation;
- b) a first collimation element for aligning the emitted radiation;
- c) a first focusing element for focusing the emitted terahertz radiation relative to a test object;
- d) a receiver for detecting terahertz radiation reflected on a test object;
- e) a second collimation element for aligning the reflected terahertz radiation;
- f) a second focusing element for focusing the reflected terahertz radiation relative to the receiver;
- g) the transmitter and the receiver are offset with respect to one another along a beam direction;
- h) at least two of the first and second collimation elements and the first and second focusing elements are separate from one another;
- i) a control apparatus for controlling the transmitter, and the control apparatus evaluates the reflected and detected terahertz radiation detected by the receiver;
- and
- j) the control apparatus evaluates the reflected and detected terahertz radiation, and determines a wall thickness of the test object.
A measuring device for reflection measurements of test objects, comprising:
- a) a transmitter for emitting terahertz radiation;
- b) a first collimation element for aligning the emitted radiation;
- c) a first focusing element for focusing the emitted terahertz radiation relative to a test object;
- d) a receiver for detecting terahertz radiation reflected on a test object;
- e) a second collimation element for aligning the reflected terahertz radiation;
- f) a second focusing element for focusing the reflected terahertz radiation relative to the receiver;
- g) the first collimation element and the second focusing element are offset with respect to one another along a beam direction;
- h) at least two of the first and second collimation elements and the first and second focusing elements are separate from one another;
- i) a control apparatus for controlling the transmitter, and the control apparatus evaluates the reflected and detected terahertz radiation detected by the receiver;
- and
- j) the control apparatus evaluates the reflected and detected terahertz radiation, and determines a wall thickness of the test object.
Dependencies are inferred from the claim text.