Temperature control apparatus, processing apparatus, and temperature control method
AssigneeTokyo Electron Limited
InventorsYasuharu Sasaki, Kazuyoshi Matsuzaki
Life of this patent
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Abstract
A temperature control apparatus (70) includes a heat exchanger (71) configured to exchange heat with the surroundings using a phase change of a refrigerant, a rotary pump (73) configured to receive the refrigerant from the heat exchanger (71) and fuse the refrigerant with oil contained inside the rotary pump, and an oil water separator (74) configured to receive the refrigerant fused with the oil from the rotary pump (73) and separate the refrigerant from the oil. The temperature control apparatus further includes a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger (71).
Claims7
A temperature control apparatus comprising:
- a heat exchanger configured to exchange heat using a phase change of a refrigerant;
- a rotary pump configured to receive the refrigerant from the heat exchanger and fuse the refrigerant with oil contained inside the rotary pump;
- an oil refrigerant separator configured to receive the refrigerant fused with the oil from the rotary pump and separate the refrigerant from the oil;
- and
- a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger,
- wherein
- the refrigerant separated from the oil by the oil refrigerant separator circulates through the heat exchanger, the rotary pump, and the oil refrigerant separator;
- and
- the oil separated from the refrigerant by the oil refrigerant separator is recovered by the rotary pump.
A processing apparatus comprising:
- a temperature control apparatus that is mounted to a temperature control object and is configured to control a temperature of the temperature control object, the temperature control apparatus including
- a heat exchanger configured to exchange heat using a phase change of a refrigerant;
- a rotary pump configured to receive the refrigerant from the heat exchanger and fuse the refrigerant with oil contained inside the rotary pump;
- an oil refrigerant separator configured to receive the refrigerant fused with the oil from the rotary pump and separate the refrigerant from the oil;
- and
- a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger,
- wherein
- the refrigerant separated from the oil by the oil refrigerant separator circulates through the heat exchanger, the rotary pump, and the oil refrigerant separator;
- and
- the oil separated from the refrigerant by the oil refrigerant separator is recovered by the rotary pump.
Dependencies are inferred from the claim text.