Local clean zone forming apparatus
AssigneeKoken Co., Ltd.
InventorsYuki Fujishiro, Kozo Nitta, Yuji Kubota
Life of this patent
Estimating the term…
Loading patent…
AssigneeKoken Co., Ltd.
InventorsYuki Fujishiro, Kozo Nitta, Yuji Kubota
Estimating the term…
Provided is a local clean zone forming apparatus which has an excellent operability and can provide an excellent clean air space without restricting the installation location or the purpose of an operation. In the local clean zone forming apparatus, a pair of push hoods having air blowing surfaces between which an airflow alignment mechanism is formed to form uniform airflows, are disposed so that the uniform airflows discharged from the push hoods are opposite to and collide with each other in a positional relationship wherein the air blowing surfaces are parallel to each other, and the centers of the air blowing surfaces are not directly opposite to each other; and the uniform airflows are obliquely discharged at an angle with respect to the air blowing surfaces.
A local clean zone forming apparatus comprising a pair of push hoods each having an air blowing surface and having an alignment mechanism for forming uniform airflow installed inside the air blowing surface are disposed so that the uniform airflows discharged from the push hoods are opposite to and collide with each other in a positional relationship in which the air blowing surfaces are parallel to each other and the centers of the air blowing surfaces are not directly opposite each other, and the uniform airflows are obliquely discharged at an angle with respect to the air blowing surfaces to form a clean zone between air blowing surfaces, wherein
Dependencies are inferred from the claim text.