US 9,791,052 B2 · Vacuum slide gate valve

Abstract

A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

A vacuum slide gate valve comprising:

a valve wall, which has an opening and a valve seat running around the opening
a closure plate with a closure side for closing the opening in a substantially gas-tight manner,
at least one valve rod carrying the closure plate,
a drive unit, which is coupled to the at least one valve rod and which is formed in such a way that the closure plate:
by displacing the at least one valve rod in a longitudinal closing direction, substantially along a geometric longitudinal axis, is displaceable from an open position, in which the closure plate releases the opening, into an intermediate position, in which the closure plate covers the opening and the closure side is arranged opposite the valve seat at a distance therefrom;
and
by displacing the at least one valve rod in a transverse closing direction, substantially along a geometric transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position, in which the closure side of the closure plate is pressed substantially perpendicularly against the valve seat and closes the opening in a substantially gas-tight manner, and back again;
and
a valve body having a vacuum region, in which the opening, the valve seat and the closure plate are arranged, the at least one valve rod being guided movably along the longitudinal axis and the transverse axis through at least one gas-tight aperture in the valve body from the vacuum region into a drive region, which is arranged outside the vacuum region and in which the drive unit is arranged, wherein:
the at least one valve rod is rigidly connected to a sliding part of the drive unit, said sliding part being arranged in the drive region;
the sliding part, by means of a guide of the drive unit in the drive region:
is guided non-pivotably, parallel to the longitudinal axis, between a first position, in which the closure plate is in the open position, and a second position, in which the closure plate is in the intermediate position, and is slidable along the longitudinal axis, the guide blocking a further sliding of the sliding part in the longitudinal closing direction once the second position has been reached, and
is guided non-pivotably, parallel to the transverse axis, between the second position and a third position, in which the closure plate is in the closing position, and is slidable along the transverse axis,
the drive unit has a linear actuator with a displacement member linearly displaceable parallel to the longitudinal axis,
the displacement member is mechanically coupled to the sliding part via an inclined connection, in such a way that:
the displacement member, when linearly displaced in the longitudinal closing direction, exerts a force, which is directed at an incline with respect to the longitudinal closing direction, onto the sliding part with force components in the longitudinal closing direction and in the transverse closing direction in order to displace the sliding part from the first position into the second position and from the second position into the third position, and,
by means of the linear displacement of the displacement member in the longitudinal closing direction with the sliding part blocked in the longitudinal closing direction in the second position, the sliding part is slid in the transverse closing direction into the third position,
the inclined connection, which mechanically couples the displacement member to the sliding part, is formed by an inclined surface guide so as to enable a relative sliding between the displacement member and the sliding part along a geometric inclined axis, which runs at an incline with respect to the longitudinal axis in the plane in which the longitudinal axis and transverse axis lie,
the geometric inclined axis lies at an incline with respect to the longitudinal axis in such a way that the sliding part is displaceable by means of the relative sliding from the second position into the third position by the linear actuator,
the inclined surface guide is formed by:
an inclined surface on the sliding part, said inclined surface pointing at an incline in the direction against the transverse closing direction and against the longitudinal closing direction, and
rollers, which are arranged on the displacement member, span a geometric area corresponding to the inclined surface and roll over the inclined surface in the direction along the inclined axis,
the sliding part has an undercut surface, which points in a direction opposite the inclined surface, and
the displacement member has return rollers, which roll over the undercut surface in order to displace the sliding part back from the third position into the second position by the linear actuator.

21 more elements

Vacuum slide gate valve

Life of this patent

Vacuum slide gate valve

Life of this patent

Abstract

Claims20