Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device
AssigneeCanon Kabushiki Kaisha
InventorYugo Shibata
Life of this patent
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Abstract
A vibration isolation apparatus includes a support unit that elastically supports an object to a mounting surface, a measurement sensor that measures a displacement of the object relative to the mounting surface, a drive unit that drives the object, and a storage unit. The storage unit stores data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a support unit and that corresponds to the displacement. The drive unit drives the object in accordance with the displacement of the object and the data.
Claims9
A vibration isolation apparatus comprising:
- a support unit configured to elastically support an object to a mounting surface;
- a measurement sensor configured to measure a displacement of the object relative to the mounting surface;
- a drive unit configured to drive the object;
- and
- a storage unit configured to store data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including the support unit, the non-linear force varies corresponding to the displacement of the object,
- wherein the drive unit drives the object in a direction that includes a component of a displacement direction of the object in accordance with the data and the displacement of the object measured by the measurement sensor.
A vibration isolation apparatus comprising:
- a support unit that elastically supports an object to a mounting surface;
- a measurement sensor that measures a displacement of the object relative to the mounting surface;
- a drive unit that drives the object;
- and
- a storage unit that stores data indicating a relationship between the displacement of the object and a spring constant that varies corresponding to the displacement,
- wherein the drive unit drives the object in a direction that includes a component of a displacement direction of the object in accordance with command information calculated by multiplying the displacement measured by the measurement sensor by the spring constant corresponding to the displacement in the relationship.
A method of isolating vibration that isolates an object from vibration, the method comprising the steps of:
- measuring a displacement of the object in a predetermined direction relative to a mounting surface;
- obtaining data that indicates a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a unit elastically supporting the object, the non-linear force varies corresponding to the displacement of the object;
- and
- driving the object in a direction that includes a component of a displacement direction of the object in accordance with the data and the displacement measured by the measurement sensor.
Dependencies are inferred from the claim text.