US 9,790,946 B2Granted

Exhaust pump

AssigneeEdwards Japan Limited

InventorsYoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada

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Abstract

An exhaust pump includes: a cylindrical rotating member; an outer cylindrical fixed member; an inner cylindrical fixed member a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.

Claims9

Dependent claims

An exhaust pump, comprising:

a cylindrical rotating member;
support means for rotatably supporting said cylindrical rotating member about an axis thereof;
a driving means for rotationally driving said cylindrical rotating member;
an outer cylindrical fixed member disposed so as to surround an outer periphery of said cylindrical rotating member;
an inner cylindrical fixed member disposed so as to be surrounded by an inner periphery of said cylindrical rotating member;
a helical outer thread groove exhaust passage provided between said cylindrical rotating member and said outer cylindrical fixed member;
a helical inner thread groove exhaust passage provided between said cylindrical rotating member and said inner cylindrical fixed member;
and
connecting opening portions that are opened in said cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of said cylindrical rotating member to said inner thread groove exhaust passage,
wherein said cylindrical rotating member comprises a cylinder body located between said outer cylindrical fixed member and said inner cylindrical fixed member and a connection section extended to said axis from said cylinder body, at least a part of the connecting opening portions are processed parallel to the axis so as to run through, said connecting opening portions comprises a horizontal hole in said cylinder body and a vertical hole in said connection section;
and a dimension of a gap between an upstream end of said connecting opening portions and lowermost stage rotor blades from among a plurality of rotor blades that are provided in multiple stages at the outer periphery of said cylindrical rotating member which is located upstream of said connecting opening portions has a dimension needed to insert a tool for opening said connecting opening portions into said gap from an outer periphery of said cylindrical rotating member.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/820,468Filed 21 Jul 2011
Priority: JP 2010-21690928 Sep 2010
Published: US 2013/0164124 A127 Jun 2013
Granted: 17 Oct 2017
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

F04D 19/042
Specially adapted to the production of a high vacuum, e.g. molecular pumps: turbomolecular vacuum pumps
F04D 1/00
Radial-flow pumps
F04D 19/044
Specially adapted to the production of a high vacuum, e.g. molecular pumps: holweck-type pumps
F04D 29/023
Selection of particular materials: especially adapted for elastic fluid pumps